STC.UNM v. Intel Corporation

Filing 147

STC.UNM'S REPLY BRIEF ON THE ISSUE OF CLAIM CONSTRUCTION re 113 Brief, filed by STC. UNM. (Attachments: # 1 Exhibit 8 - [Excerpts from] Smith Deposition, # 2 Exhibit 9 - Smith Dep Exh 2, # 3 Exhibit 10 - RIT Website, # 4 Exhibit 11 - Smith Dep Exh 9, # 5 Exhibit 12 - Smith Dep Exh 10, # 6 Exhibit 13 - Smith Dep Exh 11, # 7 Exhibit 14 - Smith Dep Exh 12, # 8 Exhibit 15 - Smith Dep Exh 5)(Pedersen, Steven)

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Exhibit 8 [Excerpts from] Smith Deposition Testimony BRUCE SMITH - SEPTEMBER 14, 2011 1 UNITED STATES DISTRICT COURT 2 DISTRICT OF NEW MEXICO 3 ---oOo--- 4 5 6 7 8 STC.UNM, ) Plaintiff, ) ) Case No.: 10-CV-01077-RV-DWS. vs. ) Volume 1 ) Pages 1 to 211 INTEL CORPORATION, ) Defendant. ) ________________________) 9 10 11 12 13 DEPOSITION OF BRUCE SMITH 14 Wednesday, September 14, 2011 15 16 17 Reported by: 18 HEIDI BELTON, CSR, RPR, CRR, CCRR 19 Certified Shorthand Reporter No. 12885 20 _________________________________________________________ 21 JAN BROWN & ASSOCIATES 22 WORLDWIDE DEPOSITION & VIDEOGRAPHY SERVICES 23 701 Battery Street, 3rd Floor, San Francisco, CA 94111 24 (415) 981-3498 or (800) 522-7096 25 1 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 09:05:04 1 09:05:05 2 09:05:06 3 09:05:09 4 (Whereupon, the witness, BRUCE SMITH, 09:05:10 5 having been duly sworn, testified as follows:) 09:05:17 6 09:05:20 7 17:25:44 8 09:05:27 9 09:05:31 10 09:05:34 11 research and technology from 2000 to 2007; is that 09:05:41 12 correct? 09:05:41 13 09:05:44 14 09:05:45 15 Q. And did that terminate in 2007? 09:05:50 16 A. Yes. 09:05:53 17 Q. What happened? 09:05:54 18 A. Intel no longer provides that funding to the 09:05:56 19 09:06:01 20 Q. What was the funding? 09:06:02 21 A. It was a -- 09:06:03 22 MR. HUR: 09:06:04 23 You may answer. 09:06:07 24 THE WITNESS: 09:06:11 25 STC. THE VIDEOGRAPHER: If there are no stipulations, the reporter may swear in the witness. MR. HUR: I'd like to represent for the record that Dr. Chris Mack is also with us. EXAMINATION BY MR. STADHEIM: Q. Dr. Smith, you were the Intel professor of A. At Rochester Institute of Technology; that's correct. In 2007, that time frame, yeah. microelectronic engineering department. Object to the form. It was a -- an affiliate membership fee that Intel paid to the microelectronic 7 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 09:06:15 1 engineering department. 09:06:18 2 affiliates of microelectronic engineering to pay the 09:06:22 3 department to support some of the activities and 09:06:24 4 students and equipment and things like that. 09:06:26 5 BY MR. STADHEIM: 09:06:26 6 09:06:31 7 09:06:32 8 09:06:35 9 that, an arrangement was made between Intel and RIT's 09:06:40 10 development office that Intel would be allowed to have 09:06:44 11 naming rights to a professorship for the association fee 09:06:48 12 they paid. 09:06:49 13 Q. Kind of like how they name football stadiums? 09:06:52 14 A. Well, to a much lesser -- 09:06:54 15 MR. HUR: 09:06:55 16 THE WITNESS: 09:06:57 17 yeah, universities that is a common thing. 09:07:00 18 BY MR. STADHEIM: 09:07:01 19 Q. 09:07:03 20 much money? 09:07:04 21 MR. HUR: 09:07:06 22 THE WITNESS: 09:07:07 23 wasn't an endowment, which often these types of things 09:07:11 24 were. 09:07:15 25 it. Q. It's common for a lot of the And that's why you have the title Intel professor? A. Right. In 2000 or maybe it was a year before Object to form. To a much lesser extent. But, "Lesser extent," meaning you didn't get as Object to the form. Right. And the term was -- it This was an arrangement with a limited term to 8 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 09:15:22 1 question in a general sense, that's different than if 09:15:25 2 you're asking if what she said is true. 09:15:29 3 expect what she said is true because she said it to me. 09:15:32 4 BY MR. STADHEIM: 09:15:33 5 Q. Was it important to you or not? 09:15:35 6 A. Okay. 09:15:38 7 09:15:39 8 Q. Yes. 09:15:40 9 A. Yes. 09:15:40 10 Q. Very important? 09:15:40 11 A. Well, very compared to what; it was important, 09:15:47 12 09:15:47 13 Q. And you were considering at one time 09:15:48 14 increasing -- asking Intel to increase the amount from 09:15:52 15 $50,000 to $100,000; isn't that right? 09:15:58 16 09:16:02 17 at a $100,000 level, I believe in 2000 or maybe 1999. 09:16:10 18 A few years after that I came to understand 09:16:12 19 that Intel because of economic reasons decided for some 09:16:18 20 period of time they would reduce that to $50,000. 09:16:23 21 some time had passed -- and, again, I don't have the 09:16:25 22 dates in front of me, but I see this is from 2006 -- 09:16:28 23 both Ms. Stevens and I felt it might be a good time to 09:16:31 24 ask Intel if they would increase that back to what their 09:16:36 25 original promise was. I -- I -- I Is that the question, was the Intel professorship important to me? yes. A. Intel initially agreed to support the position Since 15 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 09:16:38 1 Q. But you didn't do that? 09:16:39 2 A. Well, instead -- 09:16:40 3 MR. HUR: 09:16:41 4 THE WITNESS: 09:16:43 5 wasn't the one that dealt with Intel. 09:16:47 6 this e-mail, I wasn't sure whether or not Ms. Stevens 09:16:50 7 had done it. 09:16:51 8 09:16:54 9 09:17:00 10 who took over for Ms. Stevens. 09:17:04 11 two years that lapsed since 2006 and 2008 I hadn't heard 09:17:08 12 anything else from Ms. Stevens. 09:17:10 13 the situation was. 09:17:12 14 BY MR. STADHEIM: 09:17:12 15 Q. 09:17:18 16 to you? 09:17:21 17 A. 09:17:26 18 or this exhibit, Ms. Stevens in the July 25, 2006 09:17:33 19 section of this exhibit says, in I believe the third 09:17:40 20 sentence, "I'd like to talk to you about whether we 09:17:42 21 should look at another company for your professorship." 09:17:47 22 She says that, "Intel is stating they would only be able 09:17:50 23 to make 50K." Again, and she wanted to go somewhere else 09:17:54 24 to support this professorship. 09:17:59 25 back to her on August 9 saying well, if it's -- it's not Object to the form. -- you asked if I did that. I At the time of And if you see the top of this exhibit you gave me, I corresponded with Ms. Eileen Galinski in 2008 And you can see in those So I didn't know what Why was the Intel professorship so important Well, if you look at the bottom of that e-mail Can you see I responded 16 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 09:18:03 1 all about the money. 09:18:07 2 with the microelectronic engineering department like 09:18:10 3 many of our affiliates do. 09:18:14 4 there are other things besides just the money besides 09:18:17 5 just the 50K. 09:18:20 6 Q. What? 09:18:20 7 A. Well, what I've said is they hire our 09:18:23 8 students. 09:18:29 9 companies on developing engineering courses. 09:18:34 10 is a member of the semiconductor research corporation 09:18:37 11 called SRC. 09:18:40 12 industrially -- industrial partners of SRC, has helped 09:18:45 13 support an SRC research project. 09:18:49 14 out to Ms. Stevens that there are other things that 09:18:51 15 Intel does besides just this 50K they provide to us. 09:18:55 16 09:18:58 17 09:19:02 18 09:19:06 19 09:19:24 20 09:19:25 21 August 9 correspondence I had with Ms. Stevens, I've 09:19:30 22 said that Intel has directed customization funding for 09:19:36 23 over $300,000 between 2007 and 2009. 09:19:41 24 money; that was money from the Semiconductor Research 09:19:42 25 Center, SRC. Q. Intel does some important things And I suggested to her that I work with Intel among other groups and And Intel And Intel, along with several other So I -- I was pointing Other than what you said in that document, were there any other reasons it was important to you? A. I think I've -- in 2006 I think I stated that pretty well, as I can recollect. I would also like to point out that in that That was not Intel 17 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 09:23:51 1 industrial affiliates and asks them for contribution to 09:23:54 2 the engineering program. 09:23:57 3 to ask them for this contribution. 09:24:00 4 very common. 09:24:05 5 asking Intel for a gift. 09:24:19 6 09:24:25 7 09:24:27 8 09:24:32 9 09:24:37 10 Intel was paying these dues between 2006 and 2008, as we 09:24:43 11 see from Exhibit 2. 09:24:48 12 internet and the web and all, I'm sure there are legacy 09:24:52 13 references to my Intel professorship that go beyond 09:24:57 14 2007. 09:24:58 15 09:25:01 16 09:25:09 17 09:25:12 18 09:25:13 19 Q. So you lost this and nobody told you? 09:25:16 20 A. Sounds odd, but yes, that's the way it -- 09:25:18 21 09:25:20 22 Q. Wow. 09:25:21 23 A. Well, let me say this. 09:25:24 24 09:25:29 25 Q. She's telling me she's going That's -- that's It's not unusual at all. She would be Now, after you lost this title of Intel professor, did you keep on using it? A. I believe I may have in 2008. Again, I wasn't completely aware of what had been going on, whether Q. Also, there are the nature of the Well, so when did you find out that you didn't have this title anymore? A. I believe in 2008 time frame, but I can't -- I can't recall exactly. that's the way it transpired. support. Q. We lost the financial And I wasn't aware of that. But you kept the title? 21 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 09:25:31 1 09:25:33 2 not I changed that on my CV or changed that on our web 09:25:37 3 page. 09:25:40 4 title is. 09:25:45 5 this support was. 09:25:50 6 It was only in name. 09:25:53 7 09:25:55 8 MR. HUR: 09:25:56 9 THE WITNESS: 09:25:58 10 value in this. 09:25:59 11 BY MR. STADHEIM: 09:25:59 12 Q. Sure you did. 09:26:04 13 A. I think I -- I told you I kept using it until 09:26:07 14 about 2008. 09:26:24 15 (Whereupon Exhibit 4 marked 09:26:24 16 for identification.) 09:26:24 17 09:26:35 18 09:26:43 19 the bottom e-mail here, which is dated March 31, 2009 is 09:26:53 20 an e-mail from you to Gene, and it starts, "This is 09:26:58 21 Bruce Smith, the Intel Professor of Microelectronic 09:27:03 22 Engineering at RIT." 09:27:06 23 09:27:07 24 A. Yes, I did. 09:27:10 25 Q. Does that refresh your recollection that you A. Well, keeping the title just means whether or You know, I don't -- beyond that that's all the Q. I think that also -- it also goes to what It was no obligation I had to Intel. A name that you were proud of? Object to the form. Well, as I said before, I found And you kept using it? BY MR. STADHEIM: Q. Exhibit 4 is Smith document produced 11. And Did you write that? 22 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 10:30:10 1 10:30:12 2 10:30:12 3 10:30:13 4 Q. -- isn't he? 10:30:16 5 A. He -- we go back -- if you'll allow me to go 10:30:19 6 back to the paragraph we talked about at the top. 10:30:21 7 Again, the goal is to reproduce this pattern -- which is 10:30:25 8 a pattern, Figure 1 -- "with as high a fidelity as 10:30:29 9 possible." 10:30:31 10 10:30:37 11 10:30:40 12 "While the image is significantly closer to the desired 10:30:45 13 pattern than the incoherent imaging results, there is 10:30:51 14 still significant rounding of the corners of the printed 10:30:53 15 features due to the unavailability of the spatial 10:30:56 16 frequencies needed to provide sharp corners." 10:31:01 17 10:31:04 18 desires sharp corners and he does not want round corners 10:31:11 19 or rounded corners? 10:31:16 20 MR. HUR: 10:31:17 21 THE WITNESS: 10:31:18 22 inventor -- Professor Brueck is saying that the goal is 10:31:23 23 sharp corners and he wants sharp corners. 10:31:25 24 BY MR. STADHEIM: 10:31:25 25 corners -MR. HUR: Object to the form. BY MR. STADHEIM: And the fidelity would include the sharp corners. Q. Let me read the entire sentence. "While" -- Do you agree that what he's saying is he Q. Object to the form. I would agree that the And -44 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 11:37:57 1 provide a multiplication of the individual images that 11:38:01 2 have been operated on independently with the nonlinear 11:38:05 3 thresholding responses of the two photoresist layers. 11:38:11 4 The composite mask patterns shows substantially right 11:38:15 5 angles at the corners as predicted by equation 6 and 11:38:21 6 Figure 6B." 11:38:24 7 Q. 11:38:27 8 question is in all four discussions of Figures 2, 3, 6, 11:38:36 9 and 7, Dr. Brueck talks about square corners, sharp 11:38:43 10 11:38:49 11 11:38:52 12 11:38:55 13 11:38:58 14 you had originally asked me, but I -- I would agree that 11:39:03 15 corners -- well-defined sharp corners are discussed, 11:39:17 16 yes. 11:39:17 17 BY MR. STADHEIM: 11:39:17 18 11:39:20 19 MR. HUR: 11:39:21 20 THE WITNESS: 11:39:23 21 corners are addressed in all four of these. 11:39:24 22 BY MR. STADHEIM: 11:39:25 23 11:39:27 24 about increasing pattern density; isn't that also 11:39:31 25 correct? So the answer to my question is yes. And my corners, corners; isn't that right? MR. HUR: Objection; vague. Compound. Asked and answered. THE WITNESS: Q. I'm not sure that's the question In all four of those? Q. Object to the form. I think it's true, right sharp And in none of those discussions does he talk 74 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 11:39:32 1 11:39:34 2 11:39:37 3 11:39:39 4 reference to increased pattern density in those 11:39:43 5 excerpts. 11:40:28 6 (Whereupon Exhibit 5 marked 11:40:28 7 for identification.) 11:40:28 8 11:41:06 9 11:41:09 10 which has three patterns on it, which for purposes of 11:41:25 11 what we're talking about you can assume those are 11:41:28 12 contact poles, printed and a resist. 11:41:46 13 imagine that these patterns were formed by an imaging 11:41:53 14 tool where the -- which the image is a square hole -- 11:42:08 15 let me start over again. 11:42:19 16 11:42:23 17 you do that? 11:42:25 18 A. Okay. 11:42:26 19 Q. Okay. 11:42:30 20 numerical aperture from low to high. 11:42:38 21 which of these figures would result by doing that? 11:42:43 22 11:42:45 23 11:42:52 24 11:42:56 25 MR. HUR: Vague. Object to the form. Compound. Asked and answered. THE WITNESS: As I said before, there is no BY MR. STADHEIM: Q. Dr. Smith, I've handed you Smith Exhibit 5, Now, if you Assume that the mask has a square hole. Can And now we're going to change the MR. HUR: Can you tell me Object to the form. Incomplete hypothetical. THE WITNESS: Vague. Outside the scope. So these -- you have told me these are features printed in a photoresist, correct? 75 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 11:58:38 1 11:58:39 2 the specification that talks about increasing pattern 11:58:45 3 density. 11:58:48 4 there is -- there's a lot in this patent about 11:58:50 5 increasing pattern density. 11:58:52 6 BY MR. STADHEIM: 11:58:52 7 Q. 11:58:55 8 asked about. 11:58:55 9 A. 11:58:57 10 me because you said most of the time it has to do with 11:59:00 11 square corners, so my answer is no. 11:59:40 12 11:59:43 13 11:59:43 14 11:59:47 15 transmit more or less spatial frequencies than a high 11:59:52 16 numerical aperture imaging tool? 11:59:55 17 11:59:56 18 12:00:00 19 12:00:01 20 question? 12:00:03 21 sure. 12:00:03 22 BY MR. STADHEIM: 12:00:04 23 12:00:08 24 transmit more or less spacial frequencies than a high 12:00:12 25 numerical aperture imaging tool? THE WITNESS: No. I think there's plenty in We haven't looked at it in those sections, but I didn't ask about that. I asked about what I No, I think -- well, no, I think you did ask Q. Does a low numerical -- let me start over again. Does a low numerical aperture imaging tool MR. HUR: hypothetical. Object to the form. It's beyond the scope. THE WITNESS: Q. Incomplete It should -- can you repeat the I think I understand it but I want to make Does a low numerical aperture imaging tool 89 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 12:00:15 1 MR. HUR: 12:00:16 2 THE WITNESS: 12:00:19 3 situation, we have to talk about the use of that tool. 12:00:21 4 So everything else being equal? 12:00:23 5 MR. STADHEIM: 12:00:24 6 THE WITNESS: 12:00:25 7 aperture tool would indeed transmit lower frequencies 12:00:34 8 than a high numerical aperture tool. 12:00:36 9 BY MR. STADHEIM: 12:00:36 10 12:00:45 11 and we could change the numerical aperture and we 12:00:48 12 started with A in Figure -- in Smith Exhibit 5, as we go 12:00:58 13 from A to B to C, the spatial frequencies being 12:01:05 14 transmitted would increase; is that correct? 12:01:10 15 12:01:11 16 12:01:15 17 THE WITNESS: 12:01:22 18 you said is a photoresist image. 12:01:27 19 these different numerical apertures that you just 12:01:30 20 described have already gone through -- have already been 12:01:36 21 operated on by this photoresist. 12:01:40 22 images that -- and I think I answered this already -- 12:01:44 23 that would have resulted from increasing numerical 12:01:46 24 aperture -- everything else being equal -- I would 12:01:49 25 suspect that A would be the lowest, C would be the Q. Same objections. So if we set up a hypothetical Yes. I would say a low numerical And so if we had one numerical aperture tool MR. HUR: hypothetical. Object to the form. Vague. Incomplete Scope. You have shown me what I think And the images from So the photoresist 90 JAN BROWN & ASSOCIATES (415) 981-3498 or C is the Square on Smith Ex. 16 (800) 522-7096 Dep. Ex. 5; Brief BRUCE SMITH - SEPTEMBER 14, 2011 12:01:52 1 highest numerical aperture, and B would be the results 12:01:55 2 from somewhere in between. 12:01:59 3 photoresist in this case. 12:02:00 4 BY MR. STADHEIM: 12:02:01 5 12:02:03 6 12:02:04 7 12:02:05 8 MR. HUR: 12:02:06 9 THE WITNESS: 12:02:09 10 paper. 12:02:12 11 haven't discussed or thought about, then I've got no 12:02:14 12 reason to believe it wouldn't be that direction of 12:02:18 13 numerical aperture. 12:02:37 14 12:02:38 15 12:02:39 16 MR. STADHEIM: 12:02:39 17 THE VIDEOGRAPHER: 12:02:40 18 12:02:42 19 (Recess taken from 12:02 p.m. to 12:03 p.m.) 12:03:21 20 THE VIDEOGRAPHER: 12:03:22 21 12:03 p.m. 12:03:29 22 BY MR. STADHEIM: 12:03:30 23 12:03:37 24 the numerical aperture from low to high and go from A to 12:03:40 25 B to C, the density of the holes doesn't change, does Q. The results printed in Actually, you don't just suspect that; you actually know that, don't you? A. It's hypothetical. Object to the form. This is a cartoon on a piece of So -- unless there's some other things that we MR. HUR: Can we go off the record for one second? Sure. Off the record at 12:02 p.m. Q. Back on the record at Now still looking at Exhibit 5. As we changed 91 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 12:52:56 1 sentence. 12:52:59 2 frequencies in the x-y plane do result in higher pattern 12:53:02 3 density." 12:53:05 4 on to read "higher spatial frequencies do not 12:53:09 5 necessarily result" -- I'm sorry -- "do not necessarily 12:53:12 6 result in sharper corners or smaller feature size. 12:53:16 7 example, as stated by the applicants during the 12:53:20 8 prosecution history, a feature that is square shaped can 12:53:23 9 have the same spatial frequency as a feature that is 12:53:28 10 round even though the square has sharper corners in the 12:53:31 11 x-y plane than the round feature. 12:53:35 12 larger size can have the same or greater spatial 12:53:37 13 frequency than the smaller sizes -- or smaller 12:53:42 14 features." 12:53:45 15 same declaration is -- paragraph 7 -- "The higher 12:53:53 16 spatial frequency terms represent the finer feature 12:53:55 17 detail." and that's what I'm addressing also in 12:53:59 18 paragraph 10. 12:54:10 19 Q. 12:54:14 20 12:54:21 21 12:54:23 22 also compare fundamental terms of two scenarios and talk 12:54:28 23 about whether one is higher than the other one. 12:54:29 24 12:54:32 25 The part that says, "While higher spatial That sentence goes on -- that paragraph goes For Moreover, features of And what I think I've said in my -- in that Okay. You have the fundamental terms and then the higher spatial frequency terms; is that right? A. Q. Higher than the fundamental, sure. But we can Let's just talk about the fundamental terms and all the rest of them. Okay? 124 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 12:54:34 1 A. Fair enough. 12:54:34 2 Q. Okay. 12:54:42 3 understand higher spatial frequency, the only terms that 12:54:45 4 you take into account are the fundamental terms? 12:54:52 5 MR. HUR: 12:54:52 6 THE WITNESS: 12:54:54 7 paragraph 7 and 10 where it said higher spatial 12:54:56 8 frequency is the finer feature detail. 12:55:01 9 BY MR. STADHEIM: 12:55:02 10 12:55:05 11 12:55:07 12 A. Exhibit 6? 12:55:07 13 Q. Yeah. 12:55:13 14 A. To answer which question? 12:55:17 15 Q. Well, you answered the question with regard to 12:55:21 16 12:55:23 17 A. Yes. 12:55:23 18 Q. And you circled three? 12:55:27 19 A. Right. 12:55:27 20 Q. And the rest of them didn't count, right? 12:55:29 21 12:55:31 22 12:55:32 23 12:55:33 24 those three determine or are linked to or are related to 12:55:41 25 pattern density. Q. Isn't it the fact that as you Object to the form. No. I just read to you In Figure 6, what terms did you look at to determine spatial frequencies? I'm not sure. pattern density. MR. HUR: Objection. Mischaracterizes prior testimony. THE WITNESS: I said -- I said in this case 125 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 12:55:41 1 12:55:41 2 Q. 12:55:44 3 that right? 12:55:45 4 12:55:46 5 12:55:48 6 12:55:50 7 12:55:51 8 12:55:56 9 12:55:59 10 MR. HUR: 12:56:01 11 THE WITNESS: 12:56:02 12 there are two meanings of higher -- 12:56:05 13 BY MR. STADHEIM: 12:56:05 14 12:56:09 15 12:56:12 16 12:56:16 17 or all of paragraph 10? 12:56:19 18 of paragraph 10 I'll explain it to you. 12:56:20 19 12:56:23 20 clarifying is that when I'm -- in my question right now 12:56:25 21 when I'm talking about higher spatial frequencies, I 12:56:28 22 mean whatever you meant when you used that term in 12:56:32 23 paragraph 10. 12:56:34 24 A. 12:56:36 25 BY MR. STADHEIM: And the rest of them didn't impact it; isn't MR. HUR: Objection; misstates prior testimony. THE WITNESS: In this scenario, right. BY MR. STADHEIM: Q. And pattern density is the way you determine higher spatial frequencies, right? Q. Object to the form. No, I -- there are two higher -- Higher spatial frequencies as used by you in paragraph 10 that we've read about five times. A. Q. Right. All of -- an excerpt from paragraph 10 If you'll allow me to use all You can use all you want; I'm just -- all I'm Okay? Well, there are two -- when we talk about higher, there are two ways we can talk about higher. 126 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 12:56:40 1 12:56:46 2 12:56:48 3 as you used it in paragraph 10 when you said "in the 12:56:52 4 context of the '998 patent, higher spatial frequencies 12:56:56 5 in the x-y plane do not -- do result in higher pattern 12:57:00 6 density in that plane." 12:57:04 7 spatial frequencies there. 12:57:09 8 12:57:09 9 12:57:10 10 12:57:11 11 12:57:15 12 you circled in Exhibit 6 have no impact on higher 12:57:25 13 spatial frequencies; is that right? 12:57:26 14 MR. HUR: 12:57:28 15 THE WITNESS: 12:57:29 16 MR. HUR: 12:57:29 17 12:57:29 18 12:57:31 19 MR. HUR: 12:57:38 20 THE WITNESS: 12:57:39 21 used higher that I think is consistent with the '998 12:57:45 22 patent. 12:57:47 23 compare. 12:57:52 24 about higher: 12:57:56 25 orders, we can also talk about higher than those I'm trying to answer your question now. Q. I am talking about higher spatial frequencies A. As you used the term higher Right. MR. HUR: And what's the question? BY MR. STADHEIM: Q. My question is the terms other than those that Object to the form. I didn't say that. Vague. BY MR. STADHEIM: Q. I'm asking that. Asked and answered several times. There are two ways that I have If I -- and you've given me the scenario to If I compare Figure 1 to Figure 2, we can talk If we take a look at the fundamental 127 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 12:57:58 1 fundamental orders for any individual figure. 12:58:01 2 BY MR. STADHEIM: 12:58:01 3 Q. Which one applies to the claim language? 12:58:05 4 A. They -- they both would. 12:58:15 5 Q. When you used the term "higher spatial 12:58:17 6 frequencies," in the sentence that we've read 12:58:21 7 ad nauseam, did you have something in mind as to what 12:58:26 8 you meant? 12:58:27 9 A. Yes, I did. 12:58:30 10 Q. And which of these two higher spatial 12:58:32 11 12:58:34 12 MR. HUR: 12:58:35 13 THE WITNESS: 12:58:37 14 got two parts. 12:58:38 15 BY MR. STADHEIM: 12:58:38 16 Q. 12:58:41 17 that I read. 12:58:43 18 A. And you won't let me include the second part. 12:58:49 19 Q. Let's back up. 12:58:50 20 12:58:52 21 for a while. 12:58:54 22 line. 12:58:57 23 lunch? 12:58:58 24 MR. STADHEIM: 12:58:58 25 MR. HUR: frequencies did you have in mind when you said that? Object to the form. All of them. This sentence has So that -- I'm talking about the first part MR. HUR: Rolf, I mean you've been going along I appreciate you may want to finish this But when do you think we'll be able to break for It's already -Very shortly. -- 1:00. 128 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 12:58:58 1 12:59:12 2 12:59:14 3 patent, higher spatial frequencies in the x-y plane do 12:59:17 4 result in higher pattern density in that plane," when 12:59:22 5 you said that, what were you referring to, when you 12:59:27 6 said, "higher spatial frequencies"? 12:59:30 7 12:59:31 8 12:59:32 MR. STADHEIM: Q. Very shortly. When you said "In the context of the '998 A. For that part of that sentence you're asking 9 Q. That part of that sentence. 12:59:33 10 A. For that part of the sentence it is the 12:59:35 11 fundamental orders becoming higher in frequency that 12:59:40 12 correlates to a higher pattern density. 12:59:43 13 that means. 12:59:45 14 Q. 12:59:49 15 number 1 of Exhibit 6, all the spatial frequency terms 12:59:55 16 other than the three that you've circled have no impact 12:59:59 17 on higher spatial frequencies; isn't that correct? 13:00:02 18 13:00:04 19 13:00:07 20 13:00:08 21 13:00:08 22 13:00:08 23 13:00:08 24 13:00:11 25 me? A. That's what That's what I meant by that. Okay. And in that context, as we look at In the context of that part of that paragraph. The rest of that paragraph, though, I'm addressing that. Q. Exactly. MR. HUR: Object to the form -- BY MR. STADHEIM: Q. The answer's yes? MR. HUR: -- it's vague. It's an incomplete hypothetical. 129 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 14:17:10 1 above the surface? 14:17:11 2 MR. HUR: 14:17:12 3 Mischaracterizes testimony. 14:17:16 4 14:17:18 5 14:17:18 6 Q. The color black as opposed to the color white. 14:17:21 7 A. This isn't a black fill. 14:17:24 8 This figure shows outlines. 14:17:27 9 depicts black and white. 14:17:30 10 Q. How do you know that? 14:17:31 11 A. Because there's no fill. 14:17:33 12 and all I see is outlines. 14:17:39 13 me that there are lines and spaces depicted here. 14:17:46 14 Q. If it were black, would it make a difference? 14:17:49 15 A. If it were black it wouldn't show what the 14:17:51 16 picture intends to show. 14:17:54 17 the difference between the outline of a photoresist 14:17:56 18 pattern in solid and the outline of the masked dash. 14:18:00 19 they're filled in, you wouldn't be able to recognize one 14:18:04 20 over the other. 14:18:05 21 14:18:08 22 14:18:13 23 14:18:14 24 Dr. Mack's book as I was finding examples that showed 14:18:23 25 black-and-white-filled lithography patterns. Object to the form. THE WITNESS: Black in what sense? I said -- BY MR. STADHEIM: Q. This is an outline. This isn't a figure that This is a figure that -- I'm looking at it I don't think you can tell This picture intends to show Let me ask you this: If When you prepared your declaration, did you look at this figure? A. I'm sure I did. I looked through most of 146 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 14:18:28 1 14:18:29 2 14:18:33 3 14:18:36 4 14:18:38 5 Q. The answer -- 14:18:38 6 A. It's a different -- 14:18:39 7 Q. The answer to my question is yes? 14:18:41 8 A. Can you ask your question again. 14:18:42 9 Q. You chose not to include this figure in the 14:18:44 10 14:18:49 11 14:18:52 12 14:20:17 13 (Whereupon Exhibit 9 marked 14:20:17 14 for identification.) 14:20:17 15 14:20:32 16 14:20:41 17 patent, number 5,067,002. 14:20:55 18 patent that Intel is relying on as part of its 14:21:06 19 allegation that the patent here in suit is invalid. 14:21:18 20 14:21:38 21 A. I see that. 14:21:38 22 Q. And look at reference number 92 and also look 14:22:00 23 14:22:06 24 14:22:07 25 Q. And you chose not to include this figure in your declaration exhibit; is that right? A. It's not a figure that shows black-and-white filling. exhibit to your declaration; isn't that right? A. I think Dr. Mack's got hundreds of figures. I've only included a few. BY MR. STADHEIM: Q. Okay. I've handed you Exhibit 9 which is a And this was a -- or is a Would you please look at Figure 4A. at column 7, line 61. MR. HUR: Counsel, I'm going to object to any questioning about prior art references. That is 147 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 14:28:02 1 14:28:06 2 14:28:08 3 Rolf, that if you're going to ask him a question about 14:28:10 4 this patent, you've got to give him time to review it. 14:28:14 5 92 does cover -- appears, at least on first glance, to 14:28:16 6 cover a whole bunch of parts of that figure. 14:28:26 7 BY MR. STADHEIM: 14:28:27 8 14:28:31 9 14:28:34 10 14:28:36 11 14:28:37 12 14:28:39 13 don't know what that is. 14:28:39 14 BY MR. STADHEIM: 14:28:40 15 Q. You'd take an hour to find it out? 14:28:48 16 A. It might. 14:28:48 17 (Whereupon Exhibit 10 marked 14:28:48 18 for identification.) 14:29:30 19 14:29:38 20 14:29:58 21 number 5,741,625. 14:30:06 22 is relying on in this case for its assertion that the 14:30:10 23 patent-in-suit is invalid. 14:30:15 24 14:30:21 25 white. MR. HUR: Q. This just highlights the point, So your position is you'll need an hour to study this patent to see whether that's a hole or not? MR. HUR: Well, why don't you give him some time to start? THE WITNESS: Whether to say what that is. I BY MR. STADHEIM: Q. I've handed you Exhibit 10, which is patent And this is another patent that Intel Would you please look at Figure 3D and column 5, line 42, please. 153 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 14:30:53 1 14:30:55 2 14:30:56 3 Q. Do you see 38A in Figure 3D? 14:30:59 4 A. I see that. 14:31:00 5 Q. And that is white; is it not? 14:31:05 6 A. In a -- it appears white, yes. 14:31:09 7 14:31:22 8 14:31:25 9 14:31:26 10 A. That's a very good point. 14:31:28 11 Q. So why did you say it's bounded by black? 14:31:31 12 14:31:32 13 one line of a patent he hasn't seen that's on our prior 14:31:36 14 art list. 14:31:39 15 think you've got to give him a fair chance to review the 14:31:42 16 patent if you're going to be asking him questions about 14:31:45 17 it. 14:31:48 18 pretty familiar with. 14:31:55 19 BY MR. STADHEIM: 14:31:55 20 14:32:01 21 14:32:02 22 witness -- you should give the witness whatever time he 14:32:04 23 needs to review the patent. 14:32:09 24 14:32:11 25 A. (Witness reviews document.) I see that. But it's surrounded by -- it's bounded by black. Q. If it weren't bounded by black you couldn't see it, could you? MR. HUR: Counsel, again, you're pointing to It's not a deposition about our prior art. I This is not like the '998 that he's, you know, Q. Is 38A a hole? MR. HUR: Same objections. THE WITNESS: I think the Well, what I've said in my declaration, I've used the word "convention" and I've 154 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 14:32:19 1 used the word "typical." 14:32:24 2 through the '625 or '002 patent, I'm not surprised that 14:32:31 3 you could find references that show things contrary to 14:32:35 4 the convention or what I've said is typical. 14:32:39 5 14:32:41 6 any of it; this is the first time I've ever seen it -- 14:32:44 7 as I said, 38A is bound -- it's outlined by a dark line. 14:32:49 8 And what you said is well, if it wasn't, you wouldn't 14:32:52 9 know it was there. 14:32:54 10 not a color photograph. 14:32:58 11 it might have a color. 14:33:01 12 clear doesn't necessarily mean it's a hole. 14:33:10 13 BY MR. STADHEIM: 14:33:10 14 Q. It's not a hole, is it? 14:33:11 15 A. I don't have -- 14:33:12 16 MR. HUR: 14:33:13 17 THE WITNESS: 14:33:14 18 it's a hole and now -- 14:33:15 19 MR. HUR: 14:33:16 20 THE WITNESS: 14:33:19 21 believe it's anything. 14:33:20 22 BY MR. STADHEIM: 14:33:20 23 Q. 14:33:21 24 not a hole? 14:33:22 25 Although I haven't read For the '625 patent -- although I haven't read That's exactly the point is this is If it was a color photograph, The fact that it's white or Object to the form -I don't have reason to believe -- way outside the scope. -- I don't have reason to You can't look at that picture and say it's MR. HUR: Counsel, that's not fair. 155 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 14:33:24 1 Objection. 14:33:26 2 fairly review it to fairly answer your question or I'm 14:33:30 3 going to object that it's outside the scope and 14:33:34 4 incomplete hypothetical. 14:33:36 5 14:33:38 6 14:34:35 7 (Whereupon Exhibit 11 marked 14:34:35 8 for identification.) 14:34:35 9 14:34:49 10 14:34:52 11 is patent number 6,022,815. 14:35:00 12 patent that Intel is relying on in this case for its 14:35:07 13 allegation that the patent-in-suit is invalid. 14:35:10 14 14:35:20 15 14:35:53 16 A. I see that. 14:35:56 17 Q. Okay. 14:36:00 18 14:36:07 19 A. I see that. 14:36:09 20 Q. And then above that you see a layer that is 14:36:14 21 white, 220? 14:36:19 22 A. I see that. 14:36:21 23 Q. And then you see another layer that's hash 14:36:26 24 14:36:29 25 Either you're going to give him a chance to THE WITNESS: I could tell you what that is if I'm given enough time to read the patent. BY MR. STADHEIM: Q. Okay. I've handed you Smith Exhibit 11, which And this is still another Would you please look at Figures 2F, 1 and 2; and also Figures 245 -- I'm sorry -- 2C and 2D. Let's look at Figure 2C. You see some hash-marked material that's referenced 230, right? marked the opposite way; that's 210? A. I see that. 156 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 14:51:05 1 14:51:05 2 14:51:09 3 14:51:14 4 A. 14:51:17 5 opaque. 14:52:01 6 (Whereupon Exhibit 12 marked 14:52:01 7 for identification.) 14:52:02 8 14:52:04 9 14:52:10 10 14:52:19 11 A. I see that, yes. 14:52:22 12 Q. And you are the Bruce W. Smith that's named 14:52:25 13 the inventor? 14:52:26 14 A. That's right. 14:52:33 15 Q. Would you turn to page 3 -- column 3 and at 14:52:38 16 14:52:46 17 A. Yes, I see that. 14:52:47 18 Q. It says, "Examples of such sub-lithographic 14:52:50 19 14:53:01 20 A. I see that. 14:53:05 21 Q. And the "anti-scattering bars," what does the 14:53:07 22 14:53:12 23 14:53:14 24 14:53:20 25 BY MR. STADHEIM: Q. A bar that was clear rather than opaque. You mean a hole versus a bar? No. I mean a bar that was clear rather than BY MR. STADHEIM: Q. Okay. is your patent. I've handed you Exhibit 12. And this U.S. 6,881,523 B2; is it not? That's me. line 15. features are scattering bars and anti-scattering bars." "anti" modify; scattering or bars? A. Well, it's -- as I said a few minutes ago, it's anti, dash, scattering. Q. So as -- you're testifying that these bars are 167 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 14:53:27 1 14:53:28 2 MR. HUR: 14:53:31 3 THE WITNESS: 14:53:32 4 examples from a patent, the '014 patent, which I don't 14:53:47 5 see right away as a reference. 14:53:55 6 14:54:00 7 the '014 patent used the word "scattering" and 14:54:05 8 "anti-scattering," I'm not entirely clear. 14:54:15 9 cases these are bars, consistent with what Dr. Mack has 14:54:20 10 14:54:22 11 14:54:25 12 bars that are two types. 14:54:30 13 scattering bars are dark and the anti-scattering bars 14:54:33 14 are light; they're both bars. 14:54:35 15 14:54:36 16 the bars that I've drawn follow the convention that we 14:54:41 17 talked about where the speckled area is the presence of 14:54:49 18 something and the clear or white area is the absence of 14:54:52 19 something. 14:55:04 20 BY MR. STADHEIM: 14:55:05 21 14:55:06 22 14:55:14 23 14:55:16 24 testimony. 14:55:17 25 BY MR. STADHEIM: anti-scattering? Objection; vague. What I've listed here is The reason why the inventors of this patent, In both written about in terms of bars. What I'm saying here is basically there are The scatter bar -- the And you see in the drawings that I've used, Q. Okay. So you're saying that an anti-scattering bar is still a bar; it's not a hole? MR. HUR: Objection; mischaracterizes his It's vague. 168 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 14:55:17 1 Q. Is that correct? 14:55:18 2 A. No, I didn't say that. 14:55:22 3 what I said is that the bar can either be clear or 14:55:25 4 opaque. 14:55:30 5 clear. 14:55:38 6 an opaque feature. 14:55:44 7 14:55:50 8 14:55:54 9 A. I hope I've already answered that. 14:55:56 10 Q. Well -- 14:55:57 11 A. It says "anti-scattering," so it modifies 14:56:00 12 scattering. 14:56:02 13 at the '014 patent to see why the inventors chose to use 14:56:07 14 the words "scattering" and "anti-scattering." 14:56:10 15 cases it's a bar. 14:56:11 16 14:56:13 17 is what you said. 14:56:18 18 sub-lithographic features are scattering bars and 14:56:21 19 anti-scattering bars." 14:56:24 20 knew what you were talking about; is that correct? 14:56:26 21 14:56:27 22 MR. HUR: 14:56:28 23 THE WITNESS: 14:56:29 24 I said, "Such as disclosed in U.S. Patent Number 14:56:32 25 5,821,014 (incorporated herein by reference)." Q. I didn't know what -- A scatter bar is opaque, an anti-scatter bar is Which means a bar can be either a hole or a -I think it's all consistent. My question is what does "anti" modify? Does it mean it's not a bar or is it not scattering? Q. A. Technically beyond that we'd have to look In both It seems to me what we're talking about here You said, "Examples of such I presume when you said that you Well, it's -Object to form. Well, let's finish the sentence. So -169 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 14:56:37 1 14:56:38 2 14:56:39 3 were talking about when you said "anti-scattering bar"; 14:56:43 4 isn't that right? 14:56:44 5 14:56:46 6 14:56:49 7 14:56:52 8 time and still believe that an anti-scattering bar is 14:56:58 9 not a scattering bar? 14:57:00 10 14:57:05 11 14:57:07 12 14:57:09 13 believe today is that US Patent '014 talks about both, 14:57:13 14 scattering bars and anti-scattering bars. 14:57:16 15 BY MR. STADHEIM: 14:57:16 16 Q. A scattering bar scatters light; does it not? 14:57:21 17 A. It's not that simple; and the word 14:57:23 18 "scattering" may not be appropriate -- an appropriate 14:57:26 19 name which is why I said it's a name that is more of a 14:57:29 20 marketing name than what is physically taking place. 14:57:31 21 Q. What do you understand a scattering bar does? 14:57:34 22 A. A scattering bar influences the defracted 14:57:40 23 energy field of a mask pattern and its projected image 14:57:46 24 through the optical system. 14:57:48 25 BY MR. STADHEIM: Q. A. And my question is you understood what you I knew that these are examples of subresolution lithographic features, yes. Q. And you're saying that you believed at that MR. HUR: Objection; vague. Object to the form. THE WITNESS: Q. What I'm saying here and I still Does an anti-scattering bar do the same thing? 170 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 14:57:50 1 14:57:53 2 14:57:54 3 14:57:58 4 an anti-scattering bar and a scattering bar does the 14:58:02 5 same thing? 14:58:03 6 MR. HUR: 14:58:04 7 THE WITNESS: 14:58:07 8 14:58:08 9 Q. That wasn't my question. 14:58:12 10 A. Okay. 14:58:18 11 14:58:21 12 14:58:23 13 it came out to be, the word "scattering bar" refers to 14:58:29 14 that function? 14:58:32 15 MR. HUR: 14:58:36 16 THE WITNESS: 14:58:38 17 real thing that's used -- forget about the name -- 14:58:41 18 carries out that function. 14:58:43 19 that feature, also carries out that same function for a 14:58:51 20 different type of -- different type of mask feature. 14:58:53 21 BY MR. STADHEIM: 14:58:54 22 14:58:57 23 and an anti-scattering bar is one is a bar, and one is a 14:59:03 24 hole or a trench; isn't that right? 14:59:06 25 A. It will do -- it will carry out a similar function, yes. Q. So whatever scattering is in there for, both Object to the form. They're both bars. BY MR. STADHEIM: Do they do the same thing? They serve the same function for different applications. Q. Q. A. And whether it's a marketing term or however Objection; vague. The scattering bar, the physical The anti-scattering bar, And the difference between a scattering bar That's wrong. 171 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 14:59:07 1 MR. HUR: 14:59:08 2 THE WITNESS: 14:59:09 3 MR. HUR: 14:59:10 4 14:59:11 5 Q. What's the difference? 14:59:12 6 A. They are both bars. 14:59:14 7 opaque. 14:59:17 8 Q. 14:59:19 9 14:59:21 10 14:59:23 11 14:59:25 12 Q. When you say opaque, what do you mean? 14:59:27 13 A. It means there is -- there is material in the 14:59:37 14 bar. 14:59:46 15 There is something there. 15:00:20 16 Q. 15:00:22 17 declaration. 15:00:39 18 15:00:47 19 you say, "I note that an essential element of Dr. Mack's 15:00:51 20 logic turns on his assumption that the white rectangles 15:00:54 21 of Figure 1 of the '998 patent represent upward 15:00:58 22 projecting 'posts' or 'pillars' rather than 'holes' 15:01:07 23 (openings)," -- italicized -- "and that therefore all 15:01:17 24 white or clear portions of all figures in the patent 15:01:21 25 represent posts rather than holes." Objection -That's wrong. -- to form. BY MR. STADHEIM: A scattering bar is An anti-scattering bar is clear. So what is the difference between anti-scattering bar and a scattering bar? A. I just finished saying that. is opaque. A scattering bar An anti-scattering bar is clear. There is -- there is opacity, there's opaqueness. All right. Let's turn back to your Looking at the first sentence in paragraph 4 172 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 15:50:13 1 4; that Dr. Brueck is assigning a 1 to the presence of 15:50:20 2 resist and a 0 to the absence of resist? 15:51:05 3 15:51:08 4 But since it's using tau, it may be consistent with 15:51:11 5 that. 15:51:17 6 Q. 15:51:19 7 to study it? 15:51:25 8 A. 15:51:40 9 15:51:42 10 15:53:28 11 THE WITNESS: 15:53:28 12 Okay. 15:53:30 13 MR. STADHEIM: 15:53:50 14 15:53:54 15 15:53:56 16 top of 13, which I think is called equation 6, Brueck 15:54:03 17 describes that as spatial frequency multiplying. 15:54:09 18 the spatial frequencies are multiplied, I would agree 15:54:15 19 that what he shows is this is a function of tau. 15:54:24 20 BY MR. STADHEIM: 15:54:25 21 15:54:30 22 what you already concluded from Figure 4; that he's 15:54:37 23 assigning a 1 to the presence of resist and a 0 to the 15:54:41 24 absence of resist? 15:54:44 25 A. I'm not sure if that's what that tells me. Is this a situation where you need more time Yes. Give me a few more minutes. MR. HUR: I'm also going to object to the scope. (Witness reviews document.) What was your question again? Read the question, please. (Record read.) THE WITNESS: Q. A. If I look at the equation, the And as Does that also teach you that -- or confirm For the case of spatial frequency multiplying, 189 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 15:54:49 1 15:55:30 2 15:55:34 3 15:55:36 4 A. Okay. 15:55:37 5 Q. And specifically lines 32 to 36. 15:55:54 6 A. Okay. 15:55:56 7 Q. Is tau being applied there? 15:56:10 8 A. Well, it says it's a similar calculation, so I 15:56:13 9 15:56:16 10 equation 6. 15:56:22 11 Q. 15:56:25 12 absence of resist in that section? 15:56:40 13 to 36? 15:56:57 14 MR. HUR: 15:58:25 15 THE WITNESS: 15:58:26 16 through the assignment of tau values of 0 and 1, 15:58:30 17 actually, I don't believe that's correct. 15:58:36 18 closer at columns 13, tau is the thresholding function 15:58:40 19 and the values of 0 and 1 are the developed photoresist 15:58:47 20 thickness. 15:58:52 21 thresholding has been applied. 15:58:56 22 values of 0 and 1 are associated. 15:58:59 23 developed photoresist thicknesses, not the values of 15:59:03 24 tau. 15:59:05 25 BY MR. STADHEIM: I believe that's what he's doing. Q. All right. Now would you turn to column 13 of the patent, Exhibit 1, please. assume that means it was similar to what was done in And is 1 being assigned to resist and 0 to Column 13, lines 32 Object to the form. Although we have just stepped And as I look Tau of E1X and E2X simply means that that It doesn't imply that Those are the 190 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 15:59:28 1 15:59:33 2 MR. HUR: 15:59:36 3 THE WITNESS: 15:59:37 4 which gives -- which turns the aerial image E1 of X into 15:59:45 5 a steep profile pattern. 15:59:50 6 thresholding. 15:59:55 7 multiplication -- shows us the multiplication of two 15:59:59 8 threshold resists. 16:00:00 9 BY MR. STADHEIM: 16:00:14 10 Q. Does it have a numerical value as its output? 16:00:20 11 A. Brueck doesn't tell us what the numerical 16:00:22 12 value is or how it's calculated. 16:00:28 13 Figure 5 that tau produces resist features with steep 16:00:36 14 side walls. 16:00:38 15 Dr. Brueck, the value -- the values of those -- that 16:00:47 16 profile, I suspect he would have included it in Figure 16:00:52 17 5B. 16:00:53 18 16:00:56 19 16:00:59 20 A. Didn't we learn what? 16:01:01 21 Q. That the 1's and 0's are assigned. 16:01:05 22 A. No. 16:01:08 23 16:01:10 24 Q. No, no. 16:01:12 25 Q. What is the value of the output of tau then? Q. Object to the form. Tau is a thresholding operation, It's the operation of So equation 6 says a thresh- -- the He emphasizes in If it was important to Brueck -- But didn't we learn this from looking at Figure 4? This isn't a plot for assigning 1's and 0's. But didn't we learn that from Figure 4 already? 191 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 16:01:13 1 MR. HUR: 16:01:16 2 THE WITNESS: 16:01:18 3 developed photoresist thickness. 16:01:22 4 photoresist thickness remains, I agree that that in 16:01:26 5 thickness terms is a thickness value of 1. 16:01:30 6 thresholding function. 16:01:35 7 thresholding function operates on an exposure dose. 16:01:39 8 output of that thresholding function is Figure 5B or 16:01:44 9 things that look like that. 16:01:47 10 the patent that shows tau to be numbers. 16:01:55 11 BY MR. STADHEIM: 16:01:56 12 16:02:03 13 being assigned to resist and 0 is being assigned to the 16:02:07 14 absence of resist, are you? 16:02:09 15 16:02:13 16 16:02:13 17 16:02:21 18 exercise per paragraph 8 of your second declaration 16:02:26 19 where you assign the 1's and 0's, did you take Figure 4 16:02:30 20 into account? 16:02:32 21 A. 16:02:34 22 thresholding, which eliminates all possibilities but 16:02:38 23 resist being there or resist not being there. 16:02:43 24 16:02:51 25 Q. Object to the form. The output for Figure 4 is If all your Tau is a Equation 6 says that that The There is no assignment in You're not disagreeing, however, that 1 is A. In terms of normalized thickness, I agree with Q. And when you were -- decided to do your that. Q. Figure 4 -- yes, I did. Figure 4 provides the Did you -- did you know at the time that you did the work for paragraph 8 in your declaration that 192 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 16:13:19 1 into said substrate using a combined mask,' not just 16:13:24 2 some of the pattern." 16:13:26 3 16:13:27 4 portion of that statement that says "The claim language 16:13:31 5 makes clear that all of the first pattern and all of the 16:13:34 6 second pattern must be transferred into the substrate"? 16:13:39 7 16:13:42 8 16:14:17 9 16:14:20 10 pattern and all of the second pattern must be 16:15:04 11 transferred, yes. 16:15:05 12 BY MR. STADHEIM: 16:15:05 13 16:15:16 14 16:15:23 15 A. Okay. 16:15:25 16 Q. And what you have depicted there is what is 16:15:31 17 taught in Figure 8 of the patent-in-suit; isn't that 16:15:37 18 right? 16:15:38 19 A. That's -- that's right. 16:15:48 20 Q. And the resulting pattern you depict on the 16:15:53 21 right-hand side where it says "Pattern multiplication"; 16:15:58 22 is that right? 16:16:00 23 MR. HUR: 16:16:01 24 THE WITNESS: 16:16:03 25 My question is do you agree with the first MR. HUR: Object to the form. Object to the scope. THE WITNESS: Q. I agree that all of the first Now would you look at your second declaration Exhibit 7, paragraph 8. the question. I'm there. Object to the form. Can you -- I didn't understand Can you repeat the question? 197 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 16:16:05 1 16:16:07 2 16:16:11 3 16:16:14 4 A. That's right. 16:16:15 5 Q. Okay. 16:16:19 6 pattern multiplication, that's the result of combining 16:16:24 7 the first and second pattern, correct? 16:16:29 8 A. That's correct, yes. 16:16:37 9 Q. And that does not show that all of the first 16:16:39 10 pattern and all of the second pattern is transferred 16:16:43 11 into the substrate; isn't that correct? 16:16:45 12 MR. HUR: 16:17:45 13 THE WITNESS: 16:17:47 14 of the first pattern and the second pattern on top of it 16:17:50 15 is transferred onto the substrate. 16:17:54 16 BY MR. STADHEIM: 16:18:03 17 16:18:10 18 above pattern multiplication in your paragraph 8 in 16:18:15 19 Exhibit 11, the portion that is white in the colored 16:18:21 20 picture is what is in the substrate; isn't that correct? 16:18:26 21 A. That's right. 16:18:27 22 Q. And none of the rest of it is in the 16:18:28 23 16:18:30 24 A. That's correct. 16:18:31 25 Q. So how can you possibly say that all of the BY MR. STADHEIM: Q. You have -- you have three drawings there, first pattern, second pattern, multiplication. Q. And the final of those, the one above Object to the form. No. I think that shows that all As you look at the final pattern, which is substrate? 198 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 16:18:34 1 first pattern and all of the second pattern was 16:18:38 2 transferred into the substrate? 16:18:44 3 16:18:47 4 first pattern and all of the second pattern transferred 16:18:50 5 into the substrate. 16:18:51 6 16:18:54 7 as set forth in paragraph 8 or Intel's assertion on page 16:19:00 8 24 of its first brief Exhibit 13? 16:19:05 9 16:19:21 10 16:19:28 11 necessary that Figure 8 be covered by claim 6. 16:19:37 12 a discussion of claim 6 in the mask patterns related to 16:19:46 13 claim 6. 16:19:48 14 BY MR. STADHEIM: 16:19:48 15 16:19:51 16 16:19:57 17 16:19:59 18 response to Dr. Mack's declaration. 16:20:10 19 assignment -- I'm sorry -- that staggered bars must be 16:20:14 20 opaque. 16:20:47 21 Q. 16:20:53 22 16:20:58 23 A. Yes, I believe I am. 16:21:04 24 Q. If one employs that interpretation and one 16:21:16 25 A. I stand corrected. Q. So what is wrong? MR. HUR: Is it your interpretation Object to the form. THE WITNESS: Q. It doesn't show all of the Well, I don't think it's This is Well, if Figure 8 is not covered by claim 6, why were you talking about it? A. It was addressed -- it was to -- it was in That our Are you familiar with Intel's interpretation of combined mask? uses your assignments of the 1's and 0's, can you get 199 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 16:21:21 1 16:21:27 2 16:21:33 3 16:21:33 4 16:21:35 5 I haven't looked at whether or not we can get addition 16:21:38 6 in Figure 8. 16:21:39 7 BY MR. STADHEIM: 16:21:46 8 16:21:50 9 16:22:06 10 that in Figure 8, depending on how the numbers are 16:22:19 11 assigned, either you can't get addition or you can't get 16:22:23 12 multiplication; you can only get one of them? 16:22:27 13 16:22:31 14 16:22:32 15 16:22:34 16 "getting." 16:22:38 17 here I've showed multiplication, how it would work in 16:22:41 18 a -- in an embodiment of the '998 patent, particularly 16:22:45 19 the Figure 8 embodiment. 16:22:50 20 can see in Figures 9 and 10 that work with this 16:22:53 21 convention of white areas depicting holes and being 16:22:58 22 represented by the number 1. 16:23:01 23 Figure 9 and 10. 16:23:03 24 BY MR. STADHEIM: 16:23:03 25 addition in Figure 8? MR. HUR: Object to the form. It's vague. Compound. THE WITNESS: Q. Can we get addition in Figure 8? Did you figure out or did anyone tell you that if Intel's construction of combined mask were adopted, MR. HUR: Objection; vague. Compound. Object to the form. THE WITNESS: Q. I guess I'm not really clear on I think using this convention that I show The addition embodiment you Addition would work for I'm not talking about 9 and 10. I'm talking 200 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 16:23:05 1 about 8. 16:23:10 2 figured it out or somebody told you that if Intel's 16:23:18 3 construction of combined mask were adopted, then either 16:23:22 4 you can't get addition in claim 8 or you can't get 16:23:26 5 multiplication, depending on how you assign the 1's and 16:23:30 6 0's? 16:23:30 7 16:23:32 8 16:23:33 9 16:23:34 10 16:23:35 11 16:23:36 12 It's an incomplete hypothetical. 16:23:57 13 THE WITNESS: 16:23:59 14 and multiplication. 16:24:02 15 BY MR. STADHEIM: 16:24:03 16 16:24:05 17 multiplication. 16:24:08 18 the 0's in a particular way -- 1's mean one thing and 16:24:15 19 0's mean another thing. 16:24:19 20 can't get addition. 16:24:22 21 can get addition but you can't get multiplication. 16:24:25 22 simply asking you did you figure that out, or did 16:24:28 23 somebody tell that you? 16:24:29 24 16:24:32 25 A. And I'm asking you a question of whether you In claim 8. MR. HUR: Object. BY MR. STADHEIM: Q. I'm sorry. MR. HUR: Q. Figure 8. Object to the form. It's vague. I believe you can get addition I didn't ask whether you can get addition and I'm asking if you assign the 1's and MR. HUR: compound. If you get multiplication, you If you assign it the other way, you Objection. It's vague. I'm It's It's an incomplete hypothetical. 201 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 16:24:39 1 16:24:40 2 answer that question because I think I've answered it. 16:24:43 3 I believe you can get addition and multiplication using 16:24:46 4 this numbering. 16:24:46 5 BY MR. STADHEIM: 16:24:47 6 16:24:51 7 is -- is 1 and the dark is 0. 16:24:57 8 both addition and multiplication of Figure 8. 16:25:06 9 what you're saying? 16:25:09 10 16:25:10 11 MR. HUR: 16:25:10 12 THE WITNESS: 16:25:11 13 That's where I don't understand the question. 16:25:16 14 is -- it says "Figure 8 shows an exemplary result" -- 16:25:22 15 I'm reading from column 13 -- "of multiplying two 16:25:25 16 patterns." 16:25:39 17 BY MR. STADHEIM: 16:25:40 18 16:25:48 19 tell you or did you figure out yourself that if Intel's 16:25:52 20 construction of combined mask were adopted, the result 16:25:57 21 would be that you can either get multiplication or 16:26:03 22 addition, but you can't get both? 16:26:06 23 MR. HUR: 16:26:09 24 vague than the last question. 16:26:11 25 hypothetical. THE WITNESS: Q. So the numbers you've assigned where the white A. Q. I really don't know how to You believe you can get Is that Figure 8 -Objection to form. -- is a multiplication figure. Figure 8 It's multiplication. Okay. Let's just talk in general. Object to the form. Did anyone It's even more It's an incomplete It's compound. 202 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096 BRUCE SMITH - SEPTEMBER 14, 2011 16:26:18 1 16:26:18 2 that you can't get both and asking me if somebody told 16:26:22 3 me that. 16:26:22 4 BY MR. STADHEIM: 16:26:23 5 16:26:25 6 whether one, you figured it out yourself or two, 16:26:28 7 somebody told you. 16:26:31 8 happened or it didn't happen. 16:26:33 9 or no or you've forgotten. 16:26:37 10 MR. HUR: 16:26:38 11 that it's compound at least. 16:26:42 12 still compound. 16:26:44 13 It clearly cannot be answered by a yes or no, given 16:26:49 14 now -- especially now how you've just described it. 16:26:53 15 16:26:54 16 I -- that I wasn't told and I don't believe that's a 16:27:06 17 conclusion that I've drawn. 16:27:20 18 BY MR. STADHEIM: 16:27:20 19 16:27:21 20 16:27:32 21 MR. HUR: 16:27:49 22 THE WITNESS: 16:27:51 23 16:28:03 24 16:28:06 25 THE WITNESS: Q. I'm asking you a factual question about Either of those. That either The answer is either yes I think -- I think you've admitted It's still vague. It's It's still an incomplete hypothetical. THE WITNESS: Q. So you're asking me to assume It sounds like something that Have you considered one way or the other whether Figure 8 of the patent is covered by claim 6? Object to the form. I don't believe that Figure 8 is covered by claim 6. MR. STADHEIM: Let's take a quick break here and I'll try to wrap things up. 203 JAN BROWN & ASSOCIATES (415) 981-3498 or (800) 522-7096

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