Goodard v. Google, Inc.
Filing
73
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Goodard v. Google, Inc.
Doc. 73 Att. 9
EXHIBIT I
Dockets.Justia.com
Iacoponi Iacoponi
U.S. Patent No. U.S. 5,545,592 5,545,592
Before Iacoponi: Extra Titanium Layer Before Iacoponi
Tungsten Layer Titanium Nitride Layer Extra Titanium Layer Insulation Layer Oxide Layer Silicon Body Titanium Silicide Layer
Iacoponi: '592 Patent
PRIOR ART CONTACT
Statement of Invention
The invention is an improved process for creating The a contact without depositing multiple titanium layers. This is accomplished by nitriding the nitriding the surface of the titanium silicide to create titanium silicide to nitride and depositing a titanium nitride layer over it. over
Iacoponi: '592 Patent
Nitriding the Titanium Silicide to Create the Silicide to Titanium Nitride
N N N N N Nitrogen Plasma
Iacoponi: '592 Patent
Nitrided Titanium Nitride Layer
Titanium Silicide Layer
Depositing a Titanium Nitride Layer Depositing
Iacoponi: '592 Patent
Deposited Titanium Nitride Layer
Nitrided Titanium Nitride Layer
Titanium Layer Eliminated
Prior Art Prior
Titanium Layer
Iacoponi: '592 Patent Iacoponi:
Iacoponi Invention
No Titanium Layer
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