Google Inc. v. Rockstar Consortium US LP et al

Filing 134

MOTION for Issuance of Letters Rogatory to the Superior Court of Justice of Ontario, Canada for Nortel Networks Corporation, Jean-Pierre Fortin, Angela de Wilton, Jaspreet Harit, Yee-Ning Chan, Brian Finlay Beaton, Bruce Dale Stalkie, Mitch A. Brisebois, Laura A. Mahan, Paul Michael Brennan, Brian Cruickshank, and John Eric Lumsden filed by Google Inc.. (Attachments: # 1 Exhibit A to Google's Notice of Unopposed Motion and Motion for Issuance of Letter Rogatory, # 2 Declaration of Kristin J. Madigan In Support of Google's Unopposed Motion for Issuance of Letter Rogatory, # 3 Exhibit 1, # 4 Exhibit 2, # 5 Exhibit 3, # 6 Exhibit 4, # 7 Exhibit 5, # 8 Exhibit 6, # 9 Exhibit 7, # 10 Exhibit 8, # 11 Exhibit 9, # 12 Exhibit 10, # 13 Exhibit 11, # 14 Exhibit 12, # 15 Exhibit 13, # 16 Exhibit 14, # 17 Exhibit 15, # 18 Exhibit 16, # 19 Exhibit 17, # 20 Exhibit 18, # 21 Exhibit 19, # 22 Exhibit 20, # 23 Exhibit 21, # 24 Proposed Order)(Curran, Patrick) (Filed on 9/29/2014) Modified on 9/30/2014 (cpS, COURT STAFF).

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EXHIBIT 18 [18005796] 70A United States Patent [191 [11] Patent Number: Mareantonio [45] Date of Patent: [54] BALL GRID ARRAY (BGA) INTEGRATED Inventor: [57] Gabriel Marcantonio. Nepean. Canada [73] Assignee: Northern Telecom Limited. Montreal. Canada [21] Appl. No.: 601.667 Feb. 15, 1996 [22] Filed: [51] Int. Cl.‘5 ......................... .. H01L 23/48: An improved ball grid array (BGA) package having EMI shielding is provided. In a BGA package a thermally con ductive heat spreader provided by a conductive layer. and an electrical interconnection is provided between the electri cally conductive heat spreader and solder balls of the array. dielectric body of the package. Thus in use of the package. HOIL 23/52: HOlL 29/40 US. Cl. ........................ .. 257/786: 257/780; 257/779; [5 8] Field of Search ................................... .. 257/691. 738. 257/691; 257/693 257/659. 780. 781. 786. 706. 779. 698. 693 when contacts are made from the array of solder balls to a corresponding array of contact areas of a substrate. a ground connection is simultaneously provided to the heat spreader through the solder balls. For example. one or more conduc tive contacts on the substrate may be connected to a ground plane of the substrate. and a corresponding solder balls of the package are interconnected to the heat spreader. Bene?cially. the ground connection is provided by external rows of solder balls of the array extending around sides of References Cited package. or by clusters of solder balls surrounding balls for carrying signals. Thus by providing integral ground U.S. PATENT DOCUMENTS 4,954,877 5,371,404 ABSTRACT for example by plated through holes extending through the [52] [5 6] Aug. 18, 1998 Attomey, Agent. or Firm—Angela C. de Wilton CIRCUIT PACKAGES [75] 5,796,170 9/1990 Nakanishj et a]. .................... .. 257/659 12/1994 Juskey ................................... .. 257/659 connections. the heat spreader of the BGA package func tions also a Faraday shield providing for improved shielding of electromagnetic interference. Primary Examiner—lerome Jackson Assistant Examiner—-S. V. Clark 14 Claims, 4 Drawing Sheets 214 242 to i 240 200 \ 232 .. ._ ,1 212 7 < [j ’ {\d I % 213 . l " ’ 242 \q 226 sip/224 is £228 W 14% '7 M / 222 230 231 220 251 US. Patent Aug. 18, 1998 Sheet 1 of 4 5,796,170 US. Patent Aug. 18, 1998 Sheet 2 of 4 12 5,796,170 13 24 2 32 30 FIG 2 PRIORART 5 \ 4| \JI/n \\\, 1 \ O \\ 3 l 2% \ w v\\L m O 118 138 Man . 13 “1\1 * 2\N \ V1.Lkv W\ FIG. 3 m \\ \_ 1M 1 / 1) 116 PRIOR ART 242 200 214 112 1/2131 2421 / $1“ 236 251231 250 222 218 216 218 222 231 230 224 238 220 230 FIG. 4 224 226 228 2 Z1 US. Patent Aug. 13, 1998 Sheet 3 0f 4 5,796,170 342 314 320 @991‘ 312 332 318 340 332 330 FIG. 5 wk 414 321 322 331 442 FIG. 6 542 US. Patent 1 2 Aug. 18, 1998 3 4 5 6 Sheet 4 0f 4 7 8 5,796,170 91011121314 A B C D _________________ E F G H loao Jooa Kuoo LOOOOOOOOOOOQOO Moooooeoaooeooo Noooooooooooooo FIG. 8 5.796.170 1 2 BALL GRID ARRAY (BGA) INTEGRATED CIRCUIT PACKAGES coupled to received signals. Thus these chips also tend to be sensitive to RF interference. and spacing between chips FIELD OF INVENTION BGA packages provide for many requirements. including high lead count. heat dissipation and reliability for packag ing of these chips. existing BGA packages do not provide must be sul?ciently large to reduce EMI. While existing This invention relates to improvements in a BGA inte grated circuit package. and particularly to EMI shielding for su?icient EMI shielding for this type of application. Addi a BGA integrated circuit package. tional EMI shielding in the form of grounded metal covers may be provided. not only signi?cantly increasing costs. but also adding bulk to the packaging. For some applications BACKGROUND OF THE INVENTION there is not sufficient space to house separate additional Conventionally. an integrated circuit package provides for shielding around the package. electrical connections from an integrated circuit chip to external conductors. and for protection of the chip from the external environment. Additionally. management of electro magnetic emission and thermal dissipation are increasingly important considerations in the development of improved packaging for integrated circuits chips. as described in US. SUMMARY OF THE INVENTION 15 Pat. No. 5.294.826 to the present inventor. Large integrated circuits. for example. application speci?c integrated circuits (ASICs) used in telecommunications and other applications. may dissipate powers in excess of several Watts. Consequently. it may be necessary to provide an integrated circuit package with a heat sink. Conventionally a heat sink for a packaged integrated circuit may be provided by mounting the chip in thermal contact with a slug of thermally conductive metal or alloy having an exposed surface for dissipation of heat. Where greater heat dissipa conductive material. the heat spreader also being electrically 25 tion is required. a heat sink may be provided with ?ns prises a conductively plated through hole which conduc 30 package. To prevent electromagnetic interference (EMI) from unwanted radiated emissions generated by integrated cir cuits in electronic equipment. electromagnetic shielding of electronic systems may be required to meet various regula 35 sions of integrated circuit packages. conventional packaging techniques are severely challenged in providing both elfec connection between the solder balls to the internal conduct ing layers and the heat spreader or heat slug. Side plating is 45 for high lead count integrated circuits. e.g. Application Speci?c Integrated Circuits (ASICs) for telecommunications applications. is a Ball Grid Array (BGA) package. This type of package in now available commercially from a number of suppliers in various forms for cavity-up or cavity-down con?gurations. The terminals take the form of arrays of eutectic solder balls. The solder balls are aligned with corresponding contact pad areas on a substrate. and heated 55 polyimide. or ceramic dielectric body. Optionally a BGA package may include a heat spreader for example in the form of a heat slug. which is typically copper. or another ther mally conductive metal or alloy. Another type of BGA is known as a metal BGA (MBGA) which comprise a heat slug such as copper or copper alloy extending over the surface of Alternative forms of interconnection between the heat spreader and solder balls comprises pins or a conductive connection formed by edge plating to achieve electrical requirements. may add signi?cant cost to a system. With the continued drive towards reducing the dimen BGA package body may comprise a polymer. e.g. provide Faraday shielding for the BGA package. For example. the heat spreader comprises a layer of material having a high thermal conductivity. for example. a metal through one or more of the solder balls. ling electromagnetic interference EMI. e.g. FCC to form contacts directly with the substrate. which allow for a high density of compact and reliable interconnections. The tively interconnects the heat spreader and a conductive contact to the solder balls. Thus the heat spreader may be interconnected conveniently to a grounding connection to the package. This material is also electrically conductive. and thus a the heat spreader may be reliably grounded tory standards. Addition of shielding to meet increasingly stringent international regulations and standards for control tive heat dissipation or control of electromagnetic interfer ence in a readily manufacturable and reliable package. One type of package which is now of signi?cant interest conductive. and comprising a conductive interconnection provided between the heat spreader and solder balls of the ball grid array. for providing a ground connection through the solder balls. Advantageously. the conductive interconnection com~ extending laterally of the package. to increase the exposed surface area for heat dissipation. However. the latter structure. of course. adds considerably to the size of the The present invention seeks to provide an improved BGA package for integrated circuits for control of electromagnetic interference. Thus according to one aspect of the present invention there is provided a ball grid array package for an integrated circuit comprising a dielectric body. an array of solder balls. and a heat spreader comprising a layer of a thermally a particularly cost e?°ective method of adapting known package con?gurations. The ground connection for the heat spreader is made at the same time as other interconnections. via the solder balls. A Faraday shield may be provided without need to provide separate grounding connections. A reliable ground connec tion is provided when package is attached to the substrate in the usual course of assembly. Furthermore. not only is the substrate area reduced relative to a conventional metal shield provided over the IC package. space required to provide external grounding connections is eliminated. Bene?cially. external rows of solder balls of the array provide for grounding connections to the heat spreader to extend around the package to provide an effective grounded Faraday shield. Alternatively. Faraday shielding may be provided selectively around single lines by providing grounding connections thorough selected rows or clusters of solder balls surrounding balls carrying signals. According to another aspect of the invention there is of an anodized metal. e.g. aluminum or copper which forms provided a ball grid array package for an integrated circuit a substrate of the package. 65 comprising: a heat spreader comprising a thermally and For a number of telecommunications applications. inte grated circuit chips for backplanes may be capacitatively electrically conductive material; a body of the package for enclosing an integrated circuit chip in thermal contact with 5.796. I70 3 4 the heat spreader on one side of the body‘, and disposed on circuit is shown in FIG. 1 and a cross-sectional view through section II—H of FIG. 1 is shown in FIG. 2. For example. one such a package is known as the SuperBGATM. manufactured by Arnkor/Anam. The package 10 for an integrated circuit an opposite side of the body a metallization layer de?ning conductive leads on which is disposed an array of solder balls. conductive interconnections extending through the body to lead bond pads for the integrated circuit: wherein the improvement comprises a conductive interconnection extending between the heat spreader and the array of solder balls for interconnection of the heat spreader to a ground connection through the solder balls. The resulting Faraday shielded BGA package is appli 12 comprises a thermally conductive heat spreader 14. which is typically a layer of metal. such as thin sheets or thick slug of a metal such as copper. to which the integrated circuit 12 is bonded by a thermally conductive die attach adhesive medium 13. Bond pads 16 of the integrated circuit are electrically connected via electrically conductive leads cable to cavity up or cavity down con?gurations. with an integral heat spreader or an attached heat spreader in the form of a metal slug. The latter for example includes a cavity 18 to conductive traces 20 de?ned by an electrical conduc tive layer 28 within the dielectric body of the package indicated by dielectric layers 24 and 26 of the dielectric down slug BGA. body. i.e. a structure similar to that used in printed wiring board technology. The heat spreader 14 is bonded to one side of the dielectric body. On the opposite side of the dielectric According to another aspect of the present invention there is provided an assembly of a ball grid array package. an integrated circuit. and a substrate comprising a conductive body there is provided a conductive layer 27 de?ning layer providing a ground plane. comprises: the integrated circuit enclosed within a body of the ball grid array package. a heat spreader disposed on one side of the body. the heat spreader being in thermal contact with the integrated circuit; conductive interconnections extending from contacts pads of the integrated circuit though conductive leads of the ball grid array package to corresponding solder balls of the ball grid array. each solder ball being conductively intercon nected with a corresponding one of an array of bond pads conductive traces on which is disposed an array of eutectic 20 25 provided on the substrate. and the heat spreader being interconnected through conductive leads and the solder balls to a ground plane of the substrate. trical interconnections between the solder balls 30 and the contact pads 16 of the integ'ated circuit. A layer of encap sulate 32 encloses and protects the integrated circuit 12. The cross-sectional diagram through part of the BGA in FIG. 2 shows how the package is interconnected to the substrate 38 via ball bonds formed by thermal re?ow of the solder balls 30 to form connections to corresponding indi vidual contact pads 36 on the substrate. ‘This package has Thus bene?cially. a grounding connection is reliably provided at the same time. and preferably in the same solder balls 30. Conductive vias 31 extend through the layer 24 and 26 forming the dielectric body to provide for elec one or more levels of metal interconnections. e.g. 120 and 30 manner as other connections of the IC package to the substrate. 122. in a cavity down con?guration. Another known type of BOA 100. known as a metal BGA (MBGA) is shown in FIG. 3. and comprises a metal sub strate which also serves as a heat spreader 114. The heat spreader 114 is formed from such materials as anodized Embodiments of the invention will now be described by 35 aluminum or oxidized copper. the anodization forming a BRIEF DESCRIPTION OF THE DRAWINGS way of example. with reference to the accompanying drawings. in which: FIG. 1 shows a schematic. oblique view. partially cut away. diagram of a ball grid array package of the type known as a SuperBGATM which is made by Amkor/Anam; FIG. 2 shows an enlarged cross-sectional view through part of a conventional prior art BGA package; FIG. 3 shows a cross-sectional view through another known type of BGA package known as a metal ball grid array (MBGA) package; layer 115 coating the metal substrate. Other parts of this cavity down. single tier MBGA are similar to those of the BGA in FIG. 2. and for simplicity in comparing the two structures are labeled with the same reference numerals incremented by 100. A cross-sectional diagram through part of a BGA package 200 according to a ?rst embodiment of the present invention is shown in FIG. 4. In many respects the package of the embodiment is similar to that shown in FIG. 2. That is. the 45 FIG. 4 shows an cross-sectional view through part of a BGA package according to a ?rst embodiment of the present BGA package 200 encloses an integrated circuit chip 212. invention; face down in thermal contact with a heat spreader 214. attached with a layer of thermally conductive material 213. The heat spreader 214 is provided on one side of the FIG. 5 shows a cross-sectional view through part of a BGA package according to a second embodiment of the 226. and 228. Electrically conductive leads 218 interconnect present invention; the bond pads 216 of the integrated circuit with electrically FIG. 6 shows a cross-sectional view through part of a BGA package according to a third embodiment of the conductive traces provided by two tiers of conductive layers 220 and 222 extending through the dielectric body. Another electrically conductive layer 240 is provided on the opposite surface of the dielectric body and de?nes conductive traces dielectric body of the package. which comprises layers 224. present invention; FIG. 7 shows a cross-sectional view through part of a BGA package according to an fourth embodiment of the 55 on which are disposed an array of solder balls 230. Electri cally conductive vias (for simplicity not shown in this ?gure) extend through the dielectric body to interconnect the present invention; and FIG. 8 shows a schematic plan view of the array of solder balls of a BGA package according to another embodiment of solder balls with the conductive traces within the dielectric body. The feature which di?’erentiates the BGA package from conventional known BCA packages is the conductive interconnection 242. in the form of a plated throughhole. which provides for electrical connection of the heat spreader the present invention illustrating an arrangement of ground connections to provide Faraday shielding selectively around signal pairs. DESCRIPTION OF THE PREFERRED EMBODIMENTS An oblique. partially cut away view of a known commer cially available ball grid array package for an integrated 214 to selected solder balls 231 of the array. The heat 65 spreader 214 is provided by a thermally conductive material which is also electrically conductive. for example a layer of copper or copper alloy. As shown in FIG. 4. the heat spreader 5.796.170 5 6 is electrically connected through the selected solder balls balls of the package are provided by conductive pins or side 231 to a ground plane 250 of the substrate 238. i.e. through plating to achieve electrical connection from the solder balls an electrical interconnection layer 236 of the substrate and to the internal conducting layers. and to the heat spreader or plated through holes 251. Thus the heat spreader 214 is heat slug. A package 500 of an embodiment comprising the conveniently grounded. and thereby functions as a Faraday 5 latter type of connection. that is conductive side plating 542 cage to provide EMI shielding. This package may therefore for grounding the heat spreader 514 is shown schematically be referred to as a “Faraday BGA package” (FBGA). in FIG. 7. Thus grounding of the heat spreader and conduc Conveniently. the ground connection is made at the same tive side plating 542 conveniently provides for e?’ective time. and in the same manner. as the other interconnections Faraday shielding around sides of the package. to the substrate. i.e.. by re?ow of the solder balls of the array. Thus a reliable ground connection is provided without In alternative types of packaging having arrays of con ductive terminal members other than solder balls. for additional assembly steps. example pin grid arrays. e.g. those having stubby pins. or land grid array packages. a Faraday shield may be provided by interconnection of a heat spreader or heat slug and Bene?cially. selected solder balls 231 providing for the ground connection include the external rows of solder balls along sides of the package. and surrounding internal rows of solder balls 230 for carrying signals. Thus the signal lines 15 selected terminal members. e. g. rows or clusters of terminal members. in an manner analogous to that described above are effectively enclosed by the Faraday shield comprising for ball grid array packages. the heat spreader and the grounding connections. The packages of the embodiments described above are Alternatively. where the required number of 1/05 for shown with wire bonded interconnections between bond signals limits the number of solder balls available for pads of the integrated circuit chip and conductive elements making grounding connections. rather than grounding all of the package. Alternative ball grid array package con?gu external rows of balls. rows of solder balls on selected sides rations include those in which the chip is interconnected by of the array. e.g. along three sides of the package body. may ?ip chip or TAB (tape automated bonding) technologies. provide for grounding. and rows on other sides provide for The Faraday BGA packages according to the embodi signals. In other variations. grounding of selected clusters or ments described above are based on plastic BGA packages groups of solder balls surrounding balls carrying signals using polymer dielectrics. Alternative embodiments are pro provides for selectively shielding signal lines. Grounding may be provided alternatively by internal groups or rows of solder balls of the array. as required. as shown schematically in FIG. 8. wherein balls shown as solid back represent ground connections. which surround signal pairs marked + 30 and —. Thus. as shown in dotted outline. a Faraday shield is provided around signal I/Os e.g. solder balls D2'E2 and D13/E13 which are surrounded by ground connections vided based on ceramic BGA structures. Other alternative embodiments are based on metal BGA packages in which the metal substrate forming the heat spreader is grounded as in the embodiments described above. to provide the Faraday shielding. Thus. it will be appreciated that. while speci?c embodi ments of the invention are described in detail above. numer ous variations and modi?cations of these embodiments fall (black). The EMI shielded package is provided in a reduced area within the scope of the invention as defined in the following relative to that occupied by a chip having an additional conventional grounded metal shielding provided over the package. and avoids the need for additional external ground ing posts to be provided in a separate assembly step. Thus. the resulting package is cost e?ective and provides for claims. What is claimed is: 1. A ball grid array package for an integrated circuit comprising a dielectric body. a heat spreader disposed on one side of the dielectric body comprising a layer of a compact Faraday shielding. thermally conductive material. the heat spreader also being electrically conductive. While the embodiment described above includes an inte gral heat spreader provided as part of the package. packages the dielectric body surrounding a die attach area on the according to alternative embodiments are provided with 45 separate bonded heat spreaders i.e. in the form of a bonded copper slug. and/or alternative conductive means for inter connecting a heat spreader or heat slug to solder balls of the package. as shown in FIGS. 5 to 7. Thus in a BGA package 300 according to a second 50 embodiment shown in part in FIG. 5 a separate heat spreader 314 is provided in the form of a copper slug 314 which is soldered to the package body. This embodiment comprises ground connections 342 as shown. interconnecting the cop per slug 314 and solder balls 331. Parts of interconnect layers 322 also provide for a Vss end ring shields. Intercon nect vias 321 extend between the interconnect layers 320 and 322. Another package 400 according to a third embodiment. 55 comprising: a heat spreader comprising a thermally and electrically conductive material; a body of the package for enclosing an integrated circuit chip in thermal contact with the heat spreader disposed in the con?gurations of the internal interconnection layers. The ground connection 442 for the heat spreader 414 is provided by a conductively plated through hole similar to In other packages according to alternative embodiments the interconnection between the heat spreader and the solder a plurality of solder balls of a ball arid array provided on the other side of the dielectric body. and a conductive interconnection provided between the heat spreader and selected solder balls of the ball grid array. for providing a ground connection to the heatstreader through the solder balls. 2. A ball grid array package for an integrated circuit also based on a super BGA con?guration is shown in FIG. 60 9. The latter differs from that of the ?rst embodiment only that of the ?rst embodiment. heatspreader. and providing a plurality of bond pads for wirebonding of the integrated circuit. and interconnec tion from the bond pads through the dielectric body to on one side of the body; and disposed on an opposite side of the body a metalli zation layer de?ning conductive leads on which is disposed an array of solder balls. conductive intercon nections extending through the body from solder balls 65 of the array to lead bond pads for the integrated circuit; wherein the improvement comprises a conductive inter connection extending between the heat spreader 5.796.170 8 7 10. An assembly according to claim 9 wherein the con— ductive interconnections between the heat spreader and the through the body to selected solder balls the array. for interconnection of the heat spreader to a ground con selected solder balls comprise plated through holes extend ing through the dielectric body. nection through the array of solder balls. 3. A BGA package according to claim 1 wherein selected solder balls comprise an external row of solder balls of the 11. An assembly according to claim 9 wherein the con ductive interconnections between the heat spreader and the array extending along sides of the array of solder balls. 4. A BGA package according to claim 1 wherein selected solder balls providing for grounding of the heater heat selected solder balls comprise conductive pins extending through the dielectric body. spreader comprise a cluster of solder balls surrounding solder balls for carrying signals. 12. An assembly according to claim 9 wherein the con ductive interconnection between the heat spreader and the 5. A BGA package according to claim 1 wherein the conductive interconnection comprises a plated through hole selected solder balls comprise conductive side plated regions of the dielectric body of the package. 13. A ball grid array package for an integrated circuit extending through the dielectric body and interconnecting the heat spreader and selected solder balls of the array. 6. A BGA package according to claim 1 wherein the conductive interconnection comprises a conductive pin 15 heat spreader comprising a layer of a thermally conductive material disposed on an opposite side of the dielectric body. extending through the dielectric body and interconnecting the heat spreader and selected solder balls of the array. 7. A BGA package according to claim 1 wherein the conductive interconnection comprises a side plated inter connection extending over a surface of the dielectric body to interconnect the heat spreader and selected solder balls of 20 package. and 25 ing over a surface of the package. 9. An assembly of a ball grid array package. an integrated circuit. and a substrate comprising a conductive layer pro 30 an electrically conductive heatspreader disposed on one side of the body. and an array of solder balls disposed on an opposite side of the body. the integrated circuit enclosed by the heatspreader and the dielectric body of the ball grid array package; 35 conductive interconnections extending from contact pads of the integrated circuit though conductive leads heat spreader comprising a layer of a thermally conductive material disposed on an opposite side of the dielectric body. tric body from solder balls of the ball grid array to bond pads for interconnecting an integrated circuit within the extending through the dielectric body of the ball grid package. and array package to corresponding individual solder balls other conductive interconnections provided between the of an array of solder balls; and the heat spreader being interconnected through con connection to the integrated circuit. 14. A ball grid array package for an integrated circuit the heat spreader also being electrically conductive. conductive interconnections extending through the dielec integrated circuit; on the substrate. grid array package surrounding solder balls for inter comprising a dielectric body. an array of solder balls of a ball grid array disposed on one side of the dielectric body. and a and the heat spreader being in thermal contact with the each solder ball being conductively interconnected with a corresponding one of an array of bond pads provided other conductive interconnections provided between the heat spreader and selected other solder balls of the ball grid array. for providing a ground connection to the heatspreader. the selected other solder balls comprising rows of solder balls around external edges of the ball viding a ground plane. comprising: the ball arid array package comprising a dielectric body. the heat spreader also being electrically conductive. conductive interconnections extending through the dielec tric body from solder balls of the ball grid array to bond pads for interconnecting an integrated circuit within the the array. 8. A BGA package according to claim 1 wherein the heat spreader comprises a layer of copper or copper alloy extend comprising a dielectric body. an array of solder balls of a ball grid array disposed on one side of the dielectric body. and a heat spreader and selected other solder balls of the ball grid array. for providing a ground connection to the 45 heatspreader. the selected other solder balls comprising a cluster of solder balls arranged around solder balls for carrying signals to the integrated circuit. ductive interconnections to selected solder balls con nected to the ground plane of the substrate. * * * * *

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